AMAT 0021-26609 SHUTTER DISK,A101,TTN, center needle
Product overview
AMAT 0021-26609 SHUTTER DISK is a key component of the ENDURA PVD system of Applied Materials (Amat), which is specially designed for high-precision semiconductor thin film deposition process. This part works with A101 cavity and TTN(Turbo-Thermal Needle) center needle to ensure process stability and deposition uniformity.
Core characteristics
Precision control: optimize the material flow direction and improve the uniformity and consistency of PVD (physical vapor deposition) process.
High temperature resistant design: special alloy is adopted to adapt to the harsh semiconductor manufacturing environment with high vacuum and high temperature.
Key applications: used in advanced logic and memory chip manufacturing, supporting the deposition of high yield copper interconnection structure.
Typical use
Deposition of metal films such as copper and aluminum in semiconductor manufacturing
Core components of high-precision PVD process cavity